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United States Patent 5,691,230
Forbes Nov. 25, 1997

Technique for producing small islands of silicon on insulator
Inventors: Forbes; Leonard (Corvallis, OR).
Assignee: Micron Technology, Inc. (Boise, ID).
Appl. No.: 706,230
Filed: Sept. 4, 1996
Intl. Cl. : H01L 21/76
Current U.S. Cl.: 437/62; 148/DIG 50; 437/61; 437/67; 437/72
Field of Search: 437/61, 62, 67, 72, 73; 148/DIG. 50

References Cited | [Referenced By]

U.S. Patent Documents
4,437,226Mar., 1984Soclof 437/67
4,561,932Dec., 1985Gris et al. 437/67
4,580,331Apr., 1986Soclof 437/61
4,604,162Aug., 1986Sobczak 156/657
4,615,746Oct., 1986Kawakita et al. 437/72
5,391,911Feb., 1995Beyer et al. 257/522
5,466,625Nov., 1995Hsieh et al. 437/52
5,528,062Jun., 1996Hsieh et al. 257/298

Primary Examiner: Dang; Trung
Attorney, Agent or Firm: Schwegman, Lundberg, Woessner & Kluth, P.A.


Abstract

Using sub-micron technology, silicon on insulator (SOI) rows and islands are formed in a silicon substrate. Trenches are directionally-etched in the silicon substrate, leaving rows of silicon between the trenches. Silicon nitride is then deposited over the trenches, extending partly down the sides of the trenches. An isotropic chemical etch is then used to partially undercut narrow rows of silicon in the substrate. A subsequent oxidation step fully undercuts the rows of silicon, isolating the silicon rows from adjacent active areas. Devices, such as transistors for CMOS and DRAMs, are then formed in active areas, wherein the active areas are defined on the silicon rows by LOCal Oxidation of Silicon (LOCOS).

10 Claims, 7 Drawing Figures

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