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United States Patent 5,914,511
Noble, et. al. Jun. 22, 1999

Circuit and method for a folded bit line memory using trench plate capacitor cells with body bias contacts

Abstract

A memory cell for a memory array in a folded bit line configuration. The memory cell includes an access transistor formed in a pillar of single crystal semiconductor material. The access transistor has first and second source/drain regions and a body region that are vertically aligned. A body contact is coupled to the body region of the access transistor that provides a body bias to the access transistor. The access transistor further includes a gate coupled to a word line disposed adjacent to the body region. A passing word line is separated from the gate by an insulator for coupling to other memory cells adjacent to the memory cell. A trench capacitor is also included. The trench capacitor includes a first plate that is formed integral with the first source/drain region of the access transistor and a second plate that is disposed adjacent to the first plate and separated from the first plate by a gate oxide.


Inventors: Noble; Wendell P. (Milton, VT); Forbes; Leonard (Corvallis, OR).
Assignee: Micron Technology, Inc. (Boise, ID).
Appl. No.: 944,312
Filed: Oct. 6, 1997
Intl. Cl. : H01L 27/108
Current U.S. Cl.: 257/302; 257/296; 257/301
Field of Search: 257/296, 301, 302, 304; 438/239, 242, 243

References Cited | [Referenced By]

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5,001,526Mar., 1991Gotou 257/302
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5,017,504May, 1991Nishimuro et al. 437/40
5,021,355Jun., 1991Dhong et al. 437/35
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5,057,896Oct., 1991Gotou 257/296
5,072,269Dec., 1991Hieda 257/302
5,102,817Apr., 1992Chatterjee et al. 437/47
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5,177,028Jan., 1993Manning 437/41
5,177,576Jan., 1993Kimura et al. 257/71
5,202,278Apr., 1993Mathews et al. 437/47
5,208,657May, 1993Chatterjee et al. 257/302
5,216,266Jun., 1993Ozaki 257/302
5,223,081Jun., 1993Doan 156/628
5,266,514Nov., 1993Tuan et al. 437/52
5,316,962May, 1994Matsuo et al. 438/242
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5,640,342Jun., 1997Gonzalez 365/156
5,644,540Jul., 1997Manning 365/200
5,646,900Jul., 1997Tsukude et al. 365/205
5,691,230Nov., 1997Forbes 437/62

Foreign Patent Documents
363066963Mar., 1988JP 257/305
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Primary Examiner: Thomas; Tom
Assistant Examiner: Hughes; William
Attorney, Agent or Firm: Schwegman, Lundberg, Woessner & Kluth P.A.
19 Claims, 36 Drawing Figures

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