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United States Patent 5,926,740
Forbes, et. al. Jul. 20, 1999

Graded anti-reflective coating for IC lithography


A substantially continuously graded composition silicon oxycarbide (SiOC) antireflective coating (ARC) or antireflective layer (ARL) is interposed between a photoresist layer and an underlying substrate. The ARC matches an optical impedance at the interface between the ARC and photoresist. The optical impedance decreases (absorptivity increases) substantially continuously, in the ARC in a direction away from the interface between the ARC and the photoresist. The ARC composition is graded from SiOC, at its interface with the photoresist, to SiC or Si, in a direction away from the photoresist. Reflections at the ARC-photoresist interface are substantially eliminated. Substantially all incident light, including ultraviolet (UV) and deep ultraviolet (DUV) light, is absorbed in the ARC. As a result, substantially no light reaches or is reflected from the underlying substrate. Photolithographic limitations such as swing effect and reflective notching are reduced.

Inventors: Forbes; Leonard (Corvallis, OR); Ahn; Kie Y. (Chappaqua, NY).
Assignee: Micron Technology, Inc. (Boise, ID).
Appl. No.: 958,023
Filed: Oct. 27, 1997
Intl. Cl. : H01L 21/31, H01L 21/469
Current U.S. Cl.: 438/763; 438/781; 438/931; 438/952
Field of Search: 438/783, 786, 931, 952, 763

References Cited | [Referenced By]

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4,647,472Mar., 1987Hiraki et al.
4,893,273Jan., 1990Usami 365/185
5,032,233Jul., 1991Yu et al. 204/192.28
5,066,611Nov., 1991Yu 437/173
5,111,430May, 1992Morie 365/185
5,124,780Jun., 1992Sandhu et al. 357/67
5,238,866Aug., 1993Bolz et al.
5,260,593Nov., 1993Lee 257/316
5,293,560Mar., 1994Harari 365/185
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5,369,040Nov., 1994Halvis et al. 437/3
5,378,659Jan., 1995Roman et al. 437/229
5,388,069Feb., 1995Kokubo 365/185
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5,493,140Feb., 1996Iguchi 257/316
5,508,543Apr., 1996Hartstein et al. 257/314
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5,670,790Sept., 1997Katoh et al. 257/14
5,674,356Oct., 1997Nagayama

Foreign Patent Documents
3-222367Oct., 1991JP
6-224431Aug., 1994JP
6-302828Oct., 1994JP
8-255878Oct., 1996JP
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Primary Examiner: Niebling; John
Assistant Examiner: Jones; Josetta I.
Attorney, Agent or Firm: Schwegman, Lundberg, Woessner & Kluth, P.A.
17 Claims, 2 Drawing Figures

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