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United States Patent 5,989,958
Forbes Nov. 23, 1999

Flash memory with microcrystalline silicon carbide film floating gate


A memory is described which has memory cells that store data using hot electron injection. The data is erased through electron tunneling. The memory cells are described as floating gate transistors wherein the floating gate is fabricated using a conductive layer of microcrystalline silicon carbide particles. The microcrystalline silicon carbide particles are in contact such that a charge stored on the floating gate is shared between the particles. The floating gate has a reduced electron affinity to allow for data erase operations using lower voltages.

Inventors: Forbes; Leonard (Corvallis, OR).
Assignee: Micron Technology, Inc. (Boise, ID).
Appl. No.: 136,910
Filed: Aug. 20, 1998

Related U.S. Application Data
Division of Ser No. 790,603, Jan. 29, 1997, Pat. No. 5,801,401.
Intl. Cl. : H01L 21/336, H01L 21/3205
Current U.S. Cl.: 438/257; 438/593; 438/931
Field of Search: 438/257, 258, 259, 260, 261, 264, 201, 211, 593, 594, FOR 203, 931; 148/DIG. 148

References Cited | [Referenced By]

U.S. Patent Documents
4,507,673Mar., 1985Aoyama et al. 357/23.R
5,021,999Jun., 1991Kohda et al. 365/168
5,027,171Jun., 1991Reedy et al. 357/23.5
5,111,430May, 1992Morie 365/185
5,253,196Oct., 1993Shimabukuro 365/45
5,293,560Mar., 1994Harari 365/185
5,317,535May, 1994Talreja et al. 365/185
5,388,069Feb., 1995Kokubo 365/185
5,424,993Jun., 1995Lee et al. 365/218
5,430,670Jul., 1995Rosenthal 365/45
5,434,815Jul., 1995Smarandoiu et al. 365/189.01
5,438,544Aug., 1995Makino 365/185
5,449,941Sept., 1995Yamazaki et al. 257/411
5,467,306Nov., 1995Kaya et al. 365/185.2
5,477,485Dec., 1995Bergemont et al. 365/185.24
5,485,422Jan., 1996Bauer et al. 365/168
5,493,140Feb., 1996Iguchi 257/316
5,508,543Apr., 1996Hartstein et al. 257/314
5,627,781May, 1997Hayashi et al. 365/185.2
5,629,222May, 1997Yamazaki et al. 438/264
5,670,790Sept., 1997Katoh et al. 257/14
5,754,477May, 1998Forbes 365/185.33
5,798,548Aug., 1998Fujiwara 257/319

Foreign Patent Documents
3-222367Oct., 1991JP
6-224431Aug., 1994JP
6-302828Oct., 1994JP
8-255878Oct., 1996JP
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Primary Examiner: Trinh; Michael
Attorney, Agent or Firm: Schwegman, Lundberg Woessner & Kluth P.A.
10 Claims, 5 Drawing Figures

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