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United States Patent 6,031,263
Forbes, et. al. Feb. 29, 2000

DEAPROM and transistor with gallium nitride or gallium aluminum nitride gate


A floating gate transistor has a reduced barrier energy at an interface between a gallium nitride (GaN) or gallium aluminum nitride (GaAlN) floating gate an adjacent gate insulator, allowing faster charge transfer across the gate insulator at lower voltages. Data is stored as charge on the floating gate. The data charge retention time on the floating gate is reduced. The data stored on the floating gate is dynamically refreshed. The floating gate transistor provides a dense and planar dynamic electrically alterable and programmable read only memory (DEAPROM) cell adapted for uses such as for a dynamic random access memory (DRAM) or a dynamically refreshed flash EEPROM memory. The floating gate transistor provides a high gain memory cell and low voltage operation.

Inventors: Forbes; Leonard (Corvallis, OR); Ahn; Kie Y. (Chappaqua, NY).
Assignee: Micron Technology, Inc. (Boise, ID).
Appl. No.: 902,098
Filed: Jul. 29, 1997
Intl. Cl. : H01L 29/06
Current U.S. Cl.: 257/315; 257/306; 257/318; 257/407; 438/257
Field of Search: 257/315, 321, 24, 407, 314, 318, 320, 310, 306, 532; 438/257; 365/185

References Cited | [Referenced By]

U.S. Patent Documents
4,460,670Jul., 1984Ogawa et al. 430/57
4,507,673Mar., 1985Aoyama et al. 357/23.R
4,657,699Apr., 1987Nair 252/513
4,738,729Apr., 1988Yoshida et al. 136/258
4,769,686Sept., 1988Horiuchi et al. 357/23.8
4,893,273Jan., 1990Usami 365/185
5,111,430May, 1992Morie 365/185
5,145,741Sept., 1992Quick 428/402
5,260,593Nov., 1993Lee 257/316
5,293,560Mar., 1994Harari 365/185
5,298,796Mar., 1994Tawel 307/201
5,369,040Nov., 1994Halvis et al. 437/3
5,449,941Sept., 1995Yamazaki et al. 257/411
5,465,249Nov., 1995Cooper et al. 365/149
5,477,485Dec., 1995Bergemont et al. 365/185.24
5,508,543Apr., 1996Hartstein et al. 257/314
5,530,581Jun., 1996Cogan 359/265
5,580,380Dec., 1996Liu et al. 117/86
5,604,357Feb., 1997Hori 257/24
5,623,442Apr., 1997Gotou et al. 365/185.08
5,629,222May, 1997Yamazaki et al. 438/259
5,670,790Sept., 1997Katoh et al. 257/14
5,740,104Apr., 1998Forbes 365/185.03
5,786,250Jul., 1998Wu et al. 438/254
5,801,401Sept., 1998Forbes 257/77

Foreign Patent Documents
3-222367Oct., 1991JP
6-224431Aug., 1994JP
6-302828Oct., 1994JP
8-255878Oct., 1996JP
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Primary Examiner: Monin, Jr.; Donald L.
Attorney, Agent or Firm: Schwegman, Lundberg Woessner & Kluth P.A.
53 Claims, 10 Drawing Figures

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