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United States Patent 6,153,468
Forbes, et. al. Nov. 28, 2000

Method of forming a logic array for a decoder

Abstract

A programmable memory address decode array with vertical transistors having single or split control lines is used to select only functional lines in a memory array. The transistor is a field-effect transistor (FET) having an electrically isolated (floating) gate that controls electrical conduction between source regions and drain regions. If a particular floating gate is charged with stored electrons, then the transistor will not turn on and will act as the absence of a transistor at this location in a logic array within the decoder. The decoder is programmed at memory test to select an output line responsive to the bits received via the address input lines. A logic array includes densely packed logic cells, each logic cell having a semiconductor pillar providing shared source and drain regions for two vertical floating gate transistors that have individual floating gates and control lines distributed on opposing sides of the pillar. The control lines are formed together with interconnecting address input lines. The source regions share a common ground while the drain regions are connected to the output lines. Both bulk semiconductor and silicon-on-insulator embodiments are provided. If a floating gate transistor is used to represent a logic function, an area of only 2F(^2) is needed per bit of logic, where F is the minimum lithographic feature size.


Inventors: Forbes; Leonard (Corvallis, OR); Noble; Wendell P. (Milton, VT).
Assignee: Micron Technololgy, Inc. (Boise, ID).
Appl. No.: 313,049
Filed: May 17, 1999

Related U.S. Application Data
Division of Ser No. 31,621, Feb. 27, 1998, Pat. No. 5,991,225.
Intl. Cl. : H01L 21/336, H01L 21/84
Current U.S. Cl.: 438/257; 438/157; 438/268; 438/269
Field of Search: 438/257, 268, 269, 157, 193; 365/230.06, 185.01; 257/328, 365, 329, 330, 331

References Cited | [Referenced By]

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Other References

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Primary Examiner: Smith; Matthew
Assistant Examiner: Malsawma; Lex H.
Attorney, Agent or Firm: Schwegman, Lundberg, Woessner & Kluth, P.A.
18 Claims, 20 Drawing Figures

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