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United States Patent 6,166,401
Forbes Dec. 26, 2000

Flash memory with microcrystalline silicon carbide film floating gate

Abstract

A memory is described which has memory cells that store data using hot electron injection. The data is erased through electron tunneling. The memory cells are described as floating gate transistors wherein the floating gate is fabricated using a conductive layer of microcrystalline silicon carbide particles. The microcrystalline silicon carbide particles are in contact such that a charge stored on the floating gate is shared between the particles. The floating gate has a reduced electron affinity to allow for data erase operations using lower voltages.


Inventors: Forbes; Leonard (Corvallis, OR).
Assignee: Micron Technology, Inc. (Boise, ID).
Appl. No.: 137,006
Filed: Aug. 20, 1998

Related U.S. Application Data
Continuation of (including streamline cont.) Ser. No. 790,603, Jan. 29, 1997, Pat. No. 5,801,401.
Intl. Cl. : H01L 29/72
Current U.S. Cl.: 257/77; 257/314; 257/321; 257/407; 257/412; 257/741
Field of Search: 257/77, 314, 321, 407, 412, 741

References Cited | [Referenced By]

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4,507,673Mar., 1985Aoyama et al. 357/23.R
5,021,999Jun., 1991Kohda et al. 365/168
5,027,171Jun., 1991Reedy et al. 357/23.5
5,111,430May, 1992Morie 365/185
5,253,196Oct., 1993Shimabukuro 365/45
5,260,593Nov., 1993Lee 257/316
5,293,560Mar., 1994Harari 365/185
5,317,535May, 1994Talreja et al. 365/185
5,357,134Oct., 1994Shimoji 257/325
5,388,069Feb., 1995Kokubo 365/185
5,418,743May, 1995Tomioka et al. 365/189.01
5,424,993Jun., 1995Lee et al. 365/218
5,430,670Jul., 1995Rosenthal 365/45
5,434,815Jul., 1995Smarandoiu et al. 365/189.01
5,438,544Aug., 1995Makino 365/185
5,449,941Sept., 1995Yamazaki et al. 257/411
5,465,249Nov., 1995Cooper et al. 365/149
5,467,306Nov., 1995Kaya et al. 365/185.2
5,477,485Dec., 1995Bergemont et al. 365/185.24
5,485,422Jan., 1996Bauer et al. 365/168
5,493,140Feb., 1996Iguchi 257/316
5,508,543Apr., 1996Hartstein et al. 257/314
5,580,380Dec., 1996Liu et al. 117/86
5,627,781May, 1997Hayashi et al. 365/185.2
5,670,790Sept., 1997Katoh et al. 257/14
5,801,401Sept., 1998Forbes 257/77

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Primary Examiner: Wojciechowicz; Edward
Attorney, Agent or Firm: Schwegman, Lundberg, Woessner & Kluth, P.A.
27 Claims, 5 Drawing Figures

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