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|United States Patent||6,357,107|
|Ahn ,   et al.||March 19, 2002|
The invention relates to an inductor comprising a plurality of interconnected conductive segments interwoven with a substrate. The inductance of the inductor is increased through the use of coatings and films of ferromagnetic materials such as magnetic metals, alloys, and oxides. The inductor is compatible with integrated circuit manufacturing techniques and eliminates the need in many systems and circuits for large off chip inductors. A sense and measurement coil, which is fabricated on the same substrate as the inductor, provides the capability to measure the magnetic field or flux produced by the inductor. This on chip measurement capability supplies information that permits circuit engineers to design and fabricate on chip inductors to very tight tolerances.
|Inventors:||Ahn; Kie Y. (Chappaqua, NY); Forbes; Leonard (Corvallis, OR)|
|Assignee:||Micron Technology, Inc. (Boise, ID)|
|Filed:||March 29, 2001|
|Current U.S. Class:||29/604; 29/605; 29/606; 29/607; 257/531; 257/528|
|Intern'l Class:||H01F 007/06|
|Field of Search:||29/605,606,607 257/527,528,531 365/63|
|3561110||Feb., 1971||Feulner et al.||29/602.|
|3988764||Oct., 1976||Cline et al.||357/51.|
|3996095||Dec., 1976||Ahn et al.||156/610.|
|5448822||Sep., 1995||Wu et al.||29/603.|
|5801521||Sep., 1998||Mizoguchi et al.||323/282.|
|5956073||Sep., 1999||Jin et al.||348/6.|
|6013939||Jan., 2000||El-Sharawy et al.||257/531.|
|6031273||Feb., 2000||Torok et al.||257/421.|
|6054750||Apr., 2000||Imam et al.||257/531.|
|6069397||May., 2000||Cornett et al.||257/531.|
|6240622||Jun., 2000||Ahn et al.||29/604.|
|6249039||Jun., 2001||Harvey et al.||257/531.|
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