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|United States Patent||6,756,875|
|Ahn ,   et al.||June 29, 2004|
An inductor is fabricated on a substrate having a top surface and a bottom surface. The inductor includes a plurality of holes extending through the substrate, wherein the plurality of holes interconnect the top surface and the bottom surface of the substrate. The inductor also includes a plurality of conductive posts formed in the plurality of holes and a plurality of conductive segments formed on the top surface and on the bottom surface that interconnect the conductive posts such that a continuous conductive coil is formed. The inductor also includes a magnetic core that occupies substantially the entire volume enclosed by the conductive coil.
|Inventors:||Ahn; Kie Y. (Chappaqua, NY); Forbes; Leonard (Corvallis, OR)|
|Assignee:||Micron Technology, Inc. (Boise, ID)|
|Filed:||February 3, 2003|
|Current U.S. Class:||336/200; 336/232; 336/223|
|Intern'l Class:||H01F 005/00|
|Field of Search:||336/200,223,232|
|3918148||Nov., 1975||Magdo et al.||29/840.|
|3988764||Oct., 1976||Cline et al.|
|5062197||Nov., 1991||Ngo et al.||29/606.|
|5098528||Mar., 1992||DeLalande et al.|
|5329020||Jul., 1994||Kalota et al.|
|5569626||Oct., 1996||Kurtz et al.||438/50.|
|5852866||Dec., 1998||Kuettner et al.||29/608.|
|5861647||Jan., 1999||Zhao et al.|
|5863024||Jan., 1999||Blind et al.|
|5896078||Apr., 1999||Hayakawa et al.||336/200.|
|5898020||Apr., 1999||Goyal et al.||505/239.|
|5949030||Sep., 1999||Fasano et al.||174/262.|
|5966593||Oct., 1999||Budnaitis et al.||438/118.|
|6166422||Dec., 2000||Qian et al.||257/531.|
|6249039||Jun., 2001||Harvey et al.||257/531.|
|Foreign Patent Documents|
Ahn, A Fully Integrated Planar Toroidal Inductor with a Micromachined Nicket-Iron Magnetic Bar, Sep. 1994, IEEE Transcations on Componets, Packaging, and Manufacturing Technology, Part A, Vol pp. 463-469.*
McChesney, et al. "Chemical Vapor Deposition of Iron Oxide Films for Use as Semitransparent Masks," Journal of the Electrochemical Society, May, 1971, pp. 776-781.
Shigematsu, et al. "Magnetic Properties of Amorphous Iron (III) Oxide Thin Films," Journal de Physique, Mar., 1979, pp. C2-153-154.
Dornke, et al. "Magnetic and Electronic Properties of Thin Iron Oxide Films," Surface Science, Aug., 1982, pp. 727-732.
Ouchi, et al. "High Rate Deposition of Iron-Oxide Thin Film by Reactive Sputtering," IEEE Transactions on Magnetics, Sep., 1983, pp. 1980-1982.
Kaito, et al "Structure of Iron Oxide Films Prepared by Evaporating Various Iron Oxide Powders" Applications of Surface Science Oct., 1984, pp 621-630.
Lin, et al. "Properties of RF Sputtered Iron Oxide Thin Films with CoCr and Nb as Dopants." IEEE Transactions on Magnetics. Sep., 1985 pp 1462-1464.
Joshi, et al. "Pulsed Laser Deposition of Iron Oxide and Ferrite Films" Journal of Applied Physics. Nov., 1988, pp. 5647-5649.
Li, et al. "Preparation of Amorphous Iron-containing and Crystalline Iron Oxide Films by Glow Discharge and Their Properties." Materials Science and Engineering 1990 pp. 5-13.
Dubin, Valen, M "Formation Mechanism of Porous Silicon Layers Obtained by Anodization of Monocrystalline N-type Silicon in HF Solutions." Surface Science Feb., 1992. pp 82-92.
Dhara et al. "Direct Deposition of Highly Coercive Gamma Iron Oxide Thin Films for Magnetic Recording." Journal of Applied Physics Dec., 1993. pp. 7019-7021.
Fuji, et al. "Low-Temperature Preparation and Properties of Spinel-Type Iron Oxide Films by ECR Plasma-Enhanced Matalorganic Chemical Vapor Deposition." Japanese Journal of Applied Physics, Oct., 1993, pp. L1527-1529.
Seki, et al. "Pressure/Photo Sensor Utilizing Polymer Magnetic Composite." IEEE Transactions on Magnetics. Nov., 1993, pp. 3189-3191.
Goklurk, et al. "Electric and Magnetic Properties of a Thermoplastic Elaslomer Incorporated with Ferromagnetic Powders." IEEE Transactions on Magnetics. Nov., 1993, pp. 4170-4176.
Nedkov, et al. "Microwave Polymer-Ferroxide Film Absorbers," IEEE Transactions on Magnetics. Nov., 1994. pp. 4545-4547.
Itoh, et al. "Ferrite Plating of Ba-Containing Iron Oxide Films Using Chelated Highly Alkaline (pH=11-13) Aqueous Solutions." Japanese Journal of Applied Physics Mar., 1995, pp. 1534-1536.
Craciun, et al. "On the Morphology of Porous Silicon Layers Obtained by Electrochemical Method." 1995 International Semiconductor Conference Proceedings, Oct., 1995 pp. 331-334.
Lagorce, et al. "Micromachined Polymer Magnets," IEEE Abstract 1996, pp 85-90.
Hong, et al. "Granular Magnetic Cobalt Metal/Polymer Thin Film System," IEEE Transactions on Magnetics, Sep., 1996, pp. 4475-4477.
Savin, et al. "Properties of Laser Ablated Porous Silicon," Applied Physics Letter, Nov., 1996, pp. 3048-3050.
Wan, et al. "A Composite of Polyaniline with Both Conducting and Ferromagnetic Functions," Journal of Polymer Science, 1997, pp. 2129-2136.
Vadera, et al. "Preparation and Study of Finely Dispersed Magnetic Oxide in Polymer Matrix" Journal de Physique IV Mar., 1997, pp. C1-549-C1-550.
Kim, et al. "Surface Micromachined Solenoid Inductors for High Frequency Applications," 1997 International Symposium on Microelectronics Proceedings, pp. 1-8.
Ouyang, et al. "Structure and Magnetic Properties of Iron Oxide Films Deposited by Excimer Laser Ablation of a Metal-Containing Polymer," Materials Research Bulletin, 1997, pp 1099-1107.
Baba, et al. "Ferromagnetic Particle Composite Polymer Films for Glass and Semiconductor Substrates," Optics Communications Jun. 1997, pp. 35-38.
Liu, et al. "Layer-by-Layer electrostatic Self-assembly of Nanoscale Fe.sub.3 O.sub.4 Particles and Polyimide Precursor on Silicon and Silica Surfaces," Applied Physics Letter, Oct., 1997. pp. 2265-2267.
Nam, et al. "High-Performance Planar Inductor on Thick Oxidized Porous Silicon (OPS) Substrate," IEEE Microwave and Guided Wave Letters. Aug., 1997 pp. 236-238.
Park, et al. "Ferrite-based Integrated Planar Inductors and Transformers Fabricated at Low Temperature," IEEE Transactions on Magnetics. Sep., 1997 pp. 3322-3324.
Soh, et al. "Ultra-low Resistance, Through-Water VIA (TWV) Technology and Its Applications in Three Dimensional Structures on Silicon," 1998 International Conference on Solid State Devices and Materials Proceedings, pp. 284-285.
Park et al. "Fully Integrated Micromachined Inductors with Electroplated Anisotropic Magnet Cores," 1998 Applied Power Electronics Conference and Exposition Proceedings pp. 379-385.
Namkung, et al. "Effects of Heat Treatment on the Magnetic Properties of Polymer-bound Iron Particle Cores" Journal of Applied Physics Jun., 1998. pp. 6474-6476.
Dimitrov et al. "Stoichiometry and Magnetic Properties of Iron Oxide films." 1997 Fall MRS Symposium Proceedings. pp. 89-94.
Anh, A Fully Integrated Planar Toroidal Inductor with a Micromachined Nicket-Iron Magnetic Bar, Sep. 1994, IEEE Transactions on Components, Packaging, and Manufacturing Technology, Part A, vol. 17 pp. 463-469.