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United States Patent | 6,777,715 |
Geusic , et al. | August 17, 2004 |
An integrated circuit with a number of optical waveguides that are formed in high aspect ratio holes. The high aspect ratio holes extend through a semiconductor wafer. The optical waveguides include a highly reflective material that is deposited so as to line an inner surface of the high aspect ratio holes which may be filled with air or a material with an index of refraction that is greater than 1. These metal confined waveguides are used to transmit signals between functional circuits on the semiconductor wafer and functional circuits on the back of the wafer or beneath the wafer.
Inventors: | Geusic; Joseph E. (Berkeley Heights, NJ); Ahn; Kie Y. (Chappaqua, NY); Forbes; Leonard (Corvallis, OR) |
Assignee: | Micron Technology, Inc. (Boise, ID) |
Appl. No.: | 618648 |
Filed: | July 18, 2000 |
Current U.S. Class: | 257/80; 257/99; 257/81; 257/621; 257/730; 438/65; 438/64; 438/74; 438/109 |
Intern'l Class: | H01L 027/15; H01L 031/12; H01L 033/00 |
Field of Search: | 438/48,58,64,65,66,67,69,72,74,77,81,107,109,40,298,457,57,608,609,683,685 257/80,81,99,621,730 |
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